Fabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source (Record no. 4519)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00572nam a22001817a 4500 |
| 001 - CONTROL NUMBER | |
| control field | ched32830847 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20240425162926.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 121204t xxu||||| |||| 00| 0 eng d |
| 050 ## - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | T-00898 |
| 099 ## - LOCAL FREE-TEXT CALL NUMBER (OCLC) | |
| -- | 5070 |
| -- | 5070 |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Flores, Adonis S. |
| 245 ## - TITLE STATEMENT | |
| Title | Fabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source |
| Statement of responsibility, etc. | Adonis S. Flores |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Diliman, Quezon City |
| Name of publisher, distributor, etc. | University of the Philippines |
| Date of publication, distribution, etc. | 209 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | ix, 35p. |
| 502 ## - DISSERTATION NOTE | |
| Dissertation note | Master of Science |
| Degree type | Physics |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Thesis and Dissertation |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total checkouts | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|
| Commission on Higher Education | Commission on Higher Education | 03/16/2023 | T-00898 | 03/16/2023 | 03/16/2023 | Thesis and Dissertation |