Flores, Adonis S. <br/><br/>
Fabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source 
Adonis S. Flores 
 - Diliman, Quezon City  University of the Philippines  209 
 - ix, 35p. 
<br/><br/>Master of Science 
<br/><br/><label>LC Class. No.: </label>T-00898