TY  - BOOK
AU  - Flores, Adonis S.
TI  - Fabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source
AV  - T-00898 
PY  - 0000///209
CY  - Diliman, Quezon City
PB  - University of the Philippines
N1  - Master of Science
ER  -