| 000 | 00572nam a22001817a 4500 | ||
|---|---|---|---|
| 001 | ched32830847 | ||
| 005 | 20240425162926.0 | ||
| 008 | 121204t xxu||||| |||| 00| 0 eng d | ||
| 050 | _aT-00898 | ||
| 099 |
_c5070 _d5070 |
||
| 100 | _aFlores, Adonis S. | ||
| 245 |
_aFabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source _cAdonis S. Flores |
||
| 260 |
_aDiliman, Quezon City _bUniversity of the Philippines _c209 |
||
| 300 | _aix, 35p. | ||
| 502 |
_aMaster of Science _bPhysics |
||
| 942 | _cTD | ||
| 999 |
_c4519 _d4519 |
||