Fabrication of silicon nanopillar by direct CF4 etching of silicon substrate using a gas dischare ion source Adonis S. Flores
Material type:
TextPublication details: Diliman, Quezon City University of the Philippines 209Description: ix, 35pLOC classification: - T-00898
| Item type | Current library | Call number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|
Thesis and Dissertation
|
Commission on Higher Education | Available | T-00898 |
Master of Science Physics
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